SIMS analysis of oxynitrides: Evidence for nitrogen diffusion induced by oxygen flooding

Surface and Interface Analysis

Volumn 29, Issue 11, 2000, Pages 761-765

  De Witte, H ^a,b   Conard, T ^a   Vandervorst, W ^a,c   Gijbels, R ^b  

^a IMEC   (Belgium)

^b UNIVERSITY OF ANTWERP   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION IN GASES; ION BEAMS; IONIZATION; NITROGEN; OXYGEN; SECONDARY ION MASS SPECTROMETRY; SILICON; SPUTTERING;

OXYNITRIDE;

NITRIDES;

EID: 0034323029     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/1096-9918(200011)29:11<761::AID-SIA926>3.0.CO;2-F     Document Type: Article

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