Nano-scale morphology and crystallography of laser-deposited TiN thin films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 11, 2000, Pages 6268-6271

  Wang, Hai Dan ^a   Lu, Yong Feng ^a   Mai, Zhi Hong ^a   Ren, Zhong Min ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; CRYSTALLOGRAPHY; DEPOSITION; FILM GROWTH; HARDNESS; LASER ABLATION; MORPHOLOGY; PULSED LASER APPLICATIONS; SCANNING TUNNELING MICROSCOPY; SILICON; THIN FILMS; TITANIUM NITRIDE;

NANOINDENTATION; PULSED LASER DEPOSITION;

OPTICAL COATINGS;

EID: 0034318279     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.6268     Document Type: Article

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