RTP calibration wafer using thin-film thermocouples

Materials Research Society Symposium - Proceedings

Volumn 525, Issue , 1998, Pages 87-94

  Kreider, K G ^a   Dewitt, D P ^a   Tsai, B K ^a   Lovas, F J ^a   Allen, D W ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; HEAT TRANSFER; PALLADIUM; PLATINUM; TEMPERATURE MEASUREMENT; THERMOCOUPLES; THIN FILM DEVICES;

RAPID THERMAL PROCESSING (RTP); THIN-FILM THERMOCOUPLES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031620922     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-525-87     Document Type: Conference Paper

References (26)