Maskless deposition of gold patterns on silicon

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 3198-3201

  Erickson, Lynden E ^a   Schmuki, Patrik ^b   Champion, Garth ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMISTRY; GOLD; POTASSIUM COMPOUNDS; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING;

OPTICAL ATTENUATORS;

DEPOSITION;

EID: 0034317714     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1321753     Document Type: Article

References (13)

1. S. Furukawa and M. Mehregany, Sens. Actuators A 56, 261 (1996).
2. S. S. Eskildsen and G. Sorensen, Nucl. Instrum. Methods Phys. Res. 209, 913 (1983).
3. K. Gamo, N. Takakura, N. Samoto, R. Shimizu, and S. Namba, Jpn. J. Appl. Phys., Part 2 23, L293 (1984); K. Gamo, N. Takakura, D. Takehara, and S. Namba, Extended Abstracts of the 16th International Conference on Solid State Devices and Materials (Japan Society of Applied Physics, Tokyo, 1984), p. 31.
4. K. Gamo, N. Takakura, N. Samoto, R. Shimizu, and S. Namba, Jpn. J. Appl. Phys., Part 2 23, L293 (1984); K. Gamo, N. Takakura, D. Takehara, and S. Namba, Extended Abstracts of the 16th International Conference on Solid State Devices and Materials (Japan Society of Applied Physics, Tokyo, 1984), p. 31.
5. J. Melngailis, Proc. SPIE 1465, 36 (1991).
6. The defects are vacancies induced by the incident beam. For lower energies, a smaller ion dose is sufficient.
7. P. Schmuki, L. E. Erickson, and D. J. Lockwood, Phys. Rev. Lett. 80, 4060 (1998).
8. G. Oskam, D. van Heerden, and P. C. Searson, Appl. Phys. Lett. 73, 3241 (1998).
9. The potentials are measured against a saturated calomel electrode.
10. E. Budewski, G. Staikov, and W. Lorenz, Electrochemical Phase Formation and Growth (VCH, Weinheim, 1996).
11. M. Volmer and A. Weber, Z. Phys. Chem. 119, 277 (1927).
12. L. E. Erickson, H. G. Champion, J. W. Fraser, R. Hussey, P. Schmuki, and C. Porco, J. Vac. Sci. Technol. B 15, 2358 (1997).
13. 3COOH(100%) + 20 ml HF(48%) for 5 s).