Printing halftone photographic images on diamond by focused silicon ion implantation

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2358-2361

  Erickson, L E ^a   Champion, H G ^a   Fraser, J W ^a   Hussey, R ^a   Schmuki, P ^b   Porco, C ^c  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b ETH ZURICH   (Switzerland)

^c UNIVERSITY OF ARIZONA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0011352892     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589646     Document Type: Article

References (10)

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2. C. Uzan-Saguy, C. Crytermann, R. Brener, V. Richter, M. Shannan, and R. Kalish, Appl. Phys. Lett. 67, 1194 (1995); S. Prawer and R. Kalish, Phys. Rev. B 51, 15711 (1995); R. Kalish and S. Prawer, Nucl. Instrum. Methods Phys. Res. B 106, 492 (1995).
3. C. Uzan-Saguy, C. Crytermann, R. Brener, V. Richter, M. Shannan, and R. Kalish, Appl. Phys. Lett. 67, 1194 (1995); S. Prawer and R. Kalish, Phys. Rev. B 51, 15711 (1995); R. Kalish and S. Prawer, Nucl. Instrum. Methods Phys. Res. B 106, 492 (1995).
4. B. Miller, R. Kalish, L. C. Feldman, A. Katz, N. Moriya, K. Short, and A. E. White, J. Electrochem. Soc. 141, L41 (1994).
5. S. Prawer, A. D. Devir, L. S. Balfour, and R. Kalish, Appl. Opt. 34, 636 (1995).
6. N. R. Parikh, J. D. Hunn, E. McGucken, M. L. Swanson, C. W. White, R. A. Rudder, D. P. Malta, J. B. Posthill, and R. J. Markunas, Appl. Phys. Lett. 61, 3124 (1992).
7. The photograph was obtained from a PhotoDisk Inc. CDROM.
8. The original C program was supplied by Paul Maker of JPL. It was modified for use with the halftone encoding process.
9. P. K. Bauman, T. P. Humphreys, R. J. Nemanich, K. Ishibashi, N. R. Parikh, L. M. Porter, and R. F. Davis, Diam. Relat. Mater. 3, 886 (1994).
10. 2 mask.