Intelligent quality controllers for on-line parameter design

IEEE Transactions on Semiconductor Manufacturing

Volumn 13, Issue 4, 2000, Pages 481-491

  Chinnam, Ratna Babu ^b   Ding, Jie ^c   May, Gary S ^a,d  

^a IEEE   (United States)

^b Wayne State University   (United States)

^c Evolve   (United States)

^d GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTELLIGENT QUALITY CONTROLLER; ITERATIVE INVERSION; ONLINE PARAMETER DESIGN;

APPROXIMATION THEORY; CONSTRAINT THEORY; FEEDFORWARD NEURAL NETWORKS; IDENTIFICATION (CONTROL SYSTEMS); MATHEMATICAL MODELS; ONLINE SYSTEMS; OPTIMIZATION; PLASMA ETCHING; PROCESS CONTROL; PRODUCT DESIGN; QUALITY CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE;

INTELLIGENT CONTROL;

EID: 0034313461     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.892634     Document Type: Article

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