Ultrahigh rate, wide area, plasma polymerized films from high molecular weight/low vapor pressure liquid or solid monomer precursors

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 1974-1981

  Affinito, J D ^a   Gross, M E ^a   Mounier, P A ^a   Shi, M K ^a   Graff, G L ^a  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION PROCESS; FLASH EVAPORATION; HIGH CONCENTRATION; HIGH RATE; LINEAR METERS; LIQUID MONOMERS; MOLECULARLY DOPED POLYMERS; NEW PROCESS; ORGANIC MOLECULES; PLASMA POLYMERIZED FILM; ROLL COATING; ROLL TO ROLL; SOLID FILMS; SOLID PARTICLES; WEB SPEED; WIDE AREA;

COATINGS; COMPOSITE FILMS; FLIGHT DYNAMICS; GLOW DISCHARGES; HYDROSTATIC PRESSURE; LIQUID FILMS; MONOMERS; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; PLASTIC FILMS; POLYMERS; ROLLS (MACHINE COMPONENTS); SUSPENSIONS (FLUIDS); VACUUM; VAPOR PRESSURE; VAPORS;

POLYMER FILMS;

EID: 0001386185     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581713     Document Type: Conference Paper

References (9)

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