Pinhole defect evaluation of TiN films prepared by dry coating process

Vacuum

Volumn 59, Issue 1, 2000, Pages 321-329

  Uchida, H ^a   Yamashita, M ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC POLARIZATION; CURRENT DENSITY; PASSIVATION; PROTECTIVE COATINGS; STAINLESS STEEL; SULFURIC ACID; VAPOR DEPOSITION;

DRY COATING FILM; ION PLATING; PINHOLE DEFECT;

TITANIUM NITRIDE;

EID: 0034301985     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(00)00285-2     Document Type: Article

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