Interfacial adhesion and its degradation in selected metal/oxide and dielectric/oxide interfaces in multi-layer devices

Vacuum

Volumn 59, Issue 1, 2000, Pages 292-300

  Gupta, Vijay ^a   Hernandez, Robert ^a   Wu, Jianxin ^a   Charconnet, Philippe ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ATMOSPHERIC HUMIDITY; COMPRESSIVE STRESS; LASER APPLICATIONS; MULTILAYERS; POLYIMIDES; SILICA; SILICON NITRIDE; SUBSTRATES; TENSILE STRENGTH; THIN FILMS;

LASER SPALLATION;

INTERFACES (MATERIALS);

EID: 0034301819     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(00)00282-7     Document Type: Article

References (10)

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