Electromagnetic lévitation of micro-scale actuators using microwave cavity resonators

IEE Proceedings: Microwaves, Antennas and Propagation

Volumn 147, Issue 5, 2000, Pages 359-363

  Sangsterand, A J ^a   McErlean, E ^a  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY RESONATORS; ELECTRIC FIELD EFFECTS; MAGNETIC LEVITATION; MICROELECTROMECHANICAL DEVICES;

ELECTRIC FIELD DISTRIBUTION; ELECTROMAGNETIC LEVITATION; HIGH FREQUENCY RESONANT SYSTEMS;

MICROACTUATORS;

EID: 0034299113     PISSN: 13502417     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1049/ip-map:20000736     Document Type: Article

References (5)

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2. KUMAR, S., CHO, D., and CARR, W.N.: 'Experimental study of electric suspension for micro-bearines', J. Microelectromech. Syst., 1992,1, (1), pp. 23-30
3. HE, G.H., CHEN, K.S., TAN, S.S., and WANG, W.Y.: 'Electrical lévitation for micromotors and micro-accelerometers'. Proceedings of the 8th international conference on Solid suite sensors & actuators, Stockholm, 1997, pp. 442-445
4. SANGSTER, A.J., and KELLY, M.: 'Electromagnetic lévitation using the frinaing fields of a microwave cavity'. Proceedines of ANTEM '96, Montreal, Canada, 7-9 August 1996, pp. 99-102
5. VAN BLADEL, J.: 'Small holes in a vvaveeuide wall', Proc. IEE 1971, 118, (1), pp. 43-50