A proposal for electrically levitating micromotors

Sensors and Actuators: A. Physical

Volumn 24, Issue 2, 1990, Pages 141-149

  Kumar, S ^a   Cho, D ^a   Carr, W ^b  

^a PRINCETON UNIVERSITY   (United States)

^b NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC MOTORS; ELECTRIC NETWORKS--STABILITY;

ELECTRICALLY LEVITATING MICROMOTORS; LEVITATION CIRCUITS; MICROMOTORS;

ELECTROMECHANICAL DEVICES;

EID: 0025452546     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(90)80019-2     Document Type: Article

References (15)

1. Surface-micromachining processes for electrostatic microactuator fabrication
2. A study of three microfabricated variable-capacitance motors
3. IC-processed electrostatic micromotors
4. Design considerations for a practical electrostatic micromotor
5. Electric micromotors: electromechanical characteristics
6. Electrostatic actuators for micro mechatronics
7. Design considerations for micromachined electric actuators
8. Toward the design of successful electric micromotors
9. Frictional study of IC-processed micromotors
10. Analysis of a method for magnetic levitation
11. Oscillatory stabilization of micromechanical systems
12. Capacitance calculations for a single stator, single rotor electrostatic motor
13. A study of fluid squeeze film damping
14. A perturbation method for calculating the capacitance of micromotors