Monolithic implementation of coaxial line on silicon substrate

IEEE Microwave and Wireless Components Letters

Volumn 10, Issue 10, 2000, Pages 406-408

  Jeong, In Ho ^a   Kwon, Young Se ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

BCB applications; Coaxial line; Silicon substrate; Transmission line

Indexed keywords

COAXIAL CABLES; DIELECTRIC MATERIALS; INTEGRATED CIRCUIT MANUFACTURE; MONOLITHIC INTEGRATED CIRCUITS; MULTICHIP MODULES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SUBSTRATES; TRANSMISSION LINE THEORY;

BENZOCYCLOBUTENE; COAXIAL LINE; DIELECTRIC SPACERS;

MICROSTRIP LINES;

EID: 0034291749     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/75.877227     Document Type: Article

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