Effects of sputtering power on the optical constants of Ge2Sb2Te5 thin films

Cailiao Yanjiu Xuebao/Chinese Journal of Materials Research

Volumn 14, Issue 5, 2000, Pages 501-504

  Xie, Q ^a   Hou, L S ^a   Gan, F X ^a   Ruan, H ^a   Li, J ^a   Li, J Y ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

Author keywords

Ge2Sb2Te5 thin films; Optical constants; Sputtering power

Indexed keywords

AMORPHOUS FILMS; CRYSTALLINE MATERIALS; OPTICAL PROPERTIES; SPUTTERING; LIGHT EXTINCTION; REFRACTIVE INDEX; WAVES;

GERMANIUM ALLOYS; OPTICAL CONSTANT; SPUTTERING POWER; OPTICAL CONSTANTS;

OPTICAL FILMS;

EID: 0034287342     PISSN: 10053093     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)