Effects of microstructure on optical properties of Ge2Sb2Te5 thin films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 4 SUPPL. B, 1998, Pages 2116-2117

  Kim, Jin Hong ^a   Kim, Myong R ^a  

^a LG   (South Korea)

Author keywords

Amorphous; Crystalline; Optical property; Phase change; Sputtering; Thin film

Indexed keywords

AMORPHOUS FILMS; ARGON; CRYSTAL MICROSTRUCTURE; DENSITY (SPECIFIC GRAVITY); GERMANIUM ALLOYS; OPTICAL PROPERTIES; OPTICAL RECORDING; PHASE TRANSITIONS; PRESSURE EFFECTS; SPUTTERING; THIN FILMS;

SPUTTERING PRESSURE;

OPTICAL FILMS;

EID: 0032051142     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.2116     Document Type: Article

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