Refinements of fabrication processes in sputtered double-layer ITO/InP solar cells

International Journal of Electronics

Volumn 87, Issue 9, 2000, Pages 1025-1035

  Henry, Jasmine ^a   Livingstone, J ^a  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC CONDUCTIVITY; ELECTRON BEAMS; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR JUNCTIONS; SPUTTER DEPOSITION;

SURFACE DEGRADATION;

SOLAR CELLS;

EID: 0034286529     PISSN: 00207217     EISSN: None     Source Type: Journal    
DOI: 10.1080/002072100412966     Document Type: Article

References (10)

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2. Coutts, T.J., and Yamaguchi, M., 1994, Indium phosphide-based solar cells: a critical review of their fabrication, performance and operation. In T.J. Courts and J.D. Meakin (Eds), Topics in Photovoltaics, Volume 3 (London: Academic Press), pp. 79-234.
3. Henry, J., and Livingstone J., 1994, Indium phosphide surface processing-an FTIR analysis. Applied Surface Science, 78, 159-163.
4. Henry, J., and Livingstone J., 1995, Improved solar cells using double layers and hydrogen rich fabrication ambients. Physica Status Solidi (a), 148, K51-53.
5. Henry J., and Livingstone, J., 1996, Improved double layer ITO/InP solar cells using annealing techniques. Physica Status Solid (a), 156, K9-12.
6. Henry, J., and Livingstone J., 1998, Further aspects of damage induced junction mechanisms and the role of phosphorus movement in double layer ITO/In-Sn/InP cells. Journal of Physics, Condensed Matter, 10, 2845-2859.
7. Karasawa, T., and Miyata, Y., 1993, Electrical and optical properties of indium tin oxide thin films dependence on unheated substrates by dc reactive sputtering. Thin Solid Films, 223, 135-139.
8. Massies, J., and Lemaire-Dezaly F., 1985, Auger electron spectroscopy and electron loss spectroscopy comparative study of vacuum annealing effects on InP surface. Journal of Applied Physics, 57, 237-243.
9. Rosenwaks, Y., Li, X., and Coutts, T.J., 1997, Characterisation of heat-treated ITO/InP solar cells. Journal of Vacuum Science and Technology, A, 15, (4), 2354-2358.
10. Wu, W.F., Chioi, B.S., and Hseih, S.T., 1994, Effect of sputtering power on the structure and optical properties of rf magnetron sputtering films. Semiconductor Science and Technology, 9, 1242-1249.