Modelling effects of surface tension on surface topology in spin coatings for integrated optics and micromechanics

Journal of Micromechanics and Microengineering

Volumn 10, Issue 3, 2000, Pages 299-308

  Kucherenko, S S ^a,b   Leaver, K D ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE DIFFERENCE METHOD; GLASS; HEAT CONVECTION; INTEGRATED OPTICS; MATHEMATICAL MODELS; MULTILAYERS; NAVIER STOKES EQUATIONS; SURFACE TENSION;

SPIN COATINGS;

COMPOSITE MICROMECHANICS;

EID: 0034273239     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/3/301     Document Type: Article

References (20)

1. Emslie A G, Bonner F T and Peck L G 1958 Flow of a viscous liquid on a rotating disk J. Appl. Phys. 29 858-62
2. Flack W W, Soong D S, Bell A T and Hess D W 1984 A mathematical model for spin-coating of polymer resists J. Appl. Phys. 56 1199-206
3. Meyerhofer D 1978 Characteristics of resist films produced by spinning. J. Appl. Phys. 49 3993-7
4. Stillwagon L E and Larson R G 1992 Planarization during spin coating Phys. Fluids A 4 895-903 Stillwagon L E and Larson R G 1988 Fundamentals of topographic substrate levelling J. Appl. Phys. 63 5251-8
5. Stillwagon L E and Larson R G 1992 Planarization during spin coating Phys. Fluids A 4 895-903 Stillwagon L E and Larson R G 1988 Fundamentals of topographic substrate levelling J. Appl. Phys. 63 5251-8
6. Stillwagon L E, Larson R G and Taylor G N 1987 Planarization of substrate topography by spin coating J. Electrochem. Soc. 134 2030-7
7. Chou F-C, Wu P-Y and Gong S-C 1998 Analytical solutions of film planarisation during spin coating Japan. J. Appl. Phys. 37 4321-7
8. Bornside D E, Macosko C W and Scriven L E 1989 Spin coating: one-dimensional model J. Appl. Phys. 66 5185
9. Bornside D E, Macosko C W and Scriven L E 1987 On the modelling of spin coating J. Imaging Technol. 13 122-30
10. Peurrung L M and Graves D B 1993 Spin coating over topography IEEE Trans. Semicond. Manuf. 6 72-6 Peurrung L M and Graves D B 1991 Film thickness profiles over topography in spin coating J. Electrochem. Soc. 138 2115-24
11. Peurrung L M and Graves D B 1993 Spin coating over topography IEEE Trans. Semicond. Manuf. 6 72-6 Peurrung L M and Graves D B 1991 Film thickness profiles over topography in spin coating J. Electrochem. Soc. 138 2115-24
12. Tu Yih-O 1988 Mathematical modelling and computer simulation for spin coating of ferrofluid. IEEE Trans. Magn. 24 3129-31
13. Sukanek P C 1989 A model for spin coating with topography J. Electrochem. Soc. 136 3019-26
14. Bornside D E 1988 PhD Thesis University of Minnesota, Minneapolis
15. Sparrow E M and Gregg J L 1959 Heat transfer from a rotating disk to fluids of any Prandtl number J. Heat Trans. 81 249-51 Sparrow E M and Gregg J L 1960 Mass transfer, flow and heat transfer about a rotating disk J. Heat Trans. 82 294-302 Kreith F, Taylor J H and Chong J P 1959 Heat and mass transfer from a rotating disk J. Heat Trans. 81 95-105
16. Sparrow E M and Gregg J L 1959 Heat transfer from a rotating disk to fluids of any Prandtl number J. Heat Trans. 81 249-51 Sparrow E M and Gregg J L 1960 Mass transfer, flow and heat transfer about a rotating disk J. Heat Trans. 82 294-302 Kreith F, Taylor J H and Chong J P 1959 Heat and mass transfer from a rotating disk J. Heat Trans. 81 95-105
17. Sparrow E M and Gregg J L 1959 Heat transfer from a rotating disk to fluids of any Prandtl number J. Heat Trans. 81 249-51 Sparrow E M and Gregg J L 1960 Mass transfer, flow and heat transfer about a rotating disk J. Heat Trans. 82 294-302 Kreith F, Taylor J H and Chong J P 1959 Heat and mass transfer from a rotating disk J. Heat Trans. 81 95-105
18. Dawnay E 1997 Private communication
19. Syms R R A, Huang W and Schneider V M 1996 Optimisation of borophosphosilicate glass compositions for silica-on-silicon integrated optical circuits fabricated by the sol-gel process Elect. Lett. 32 1233-4
20. Holmes A S, Syms R R A, Li Ming and Green M 1993 Fabrication of buried channel waveguides on silicon substrates using spin-on glass and rapid thermal annealing Appl. Opt. 32 4916-20