Optimisation of borophosphosilicate glass compositions for silica-on-silicon integrated optical circuits fabricated by the sol-gel process

Electronics Letters

Volumn 32, Issue 13, 1996, Pages 1233-1234

  Syms, R R A ^a   Huang, W ^a   Schneider, V M ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

Borosilicate glasses; Integrated optoelectronics; Sol gel processing

Indexed keywords

ANNEALING; BOROSILICATE GLASS; MODULATORS; OPTIMIZATION; SOL-GELS;

BOROPHOSPHOSILICATE CLADDING; BOROPHOSPHOSILICATE GLASS; BOROSILICATE BUFFER LAYER; INTERFEROMETRIC MODULATORS; PHOSPHOSILICATE CORE;

INTEGRATED OPTOELECTRONICS;

EID: 0030166398     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19960787     Document Type: Article

References (7)

1. KAWACHI, M.: 'Silica waveguides on silicon and their application to integrated-optic components', Opt. Quant. Elect., 1990, 22, pp. 391-416
2. YAFFE, H., HENRY, C.H., KAZARINOV, R.F., and MILBRODT, M.A.: 'Polarization independent silica-on-silicon Mach-Zehnder interferometers', IEEE J. Lightwave Technol., 1994, LT-12, pp. 64-67
3. SYMS, R.R.A.: 'Stress in thick sol-gel phosphosilicate glass films formed on Si substrates', J. Non-Cryst. Solids, 1994, 167, pp. 16-20
4. HOLMES, A.S., SYMS, R.R.A., MING, L., and GREEN, M.: 'Fabrication of buried channel waveguides on silicon substrates using spin-on-glass', Appl. Opt., 1993, 32, pp. 4916-4921
5. HOLMES, A.S., and SYMS, R.R.A.: 'Fabrication of of low-loss channel waveguides in sol-gel glass on silicon substrates'. 8th World Ceramics Congress, Florence, 1994, Paper SVII-1 LO9
6. SYMS, R.R.A., SCHNEIDER, V., HUANG, W., and HOLMES, A.S.: 'Low loss achieved in sol-gel based silica-on-silicon integrated optics using borophosphosilicate glass', Electron. Lett., 1995, 31, pp. 1833-1834
7. 5 system', J. Mat. Sci., 1993, A28, pp. 1097-1106