Cathodic plasma polymerization and treatment by anode magnetron torch: II. The influence of operating parameters on the argon sputtering rate distribution

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 6, 1999, Pages 3157-3165

  Zhao, J G ^a   Yasuda, H ^a  

^a University of Missouri   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033433186     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582065     Document Type: Article

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