Magnetron sputtering of CoCr/Cr and CoCrTa/Cr on flexible substrates

IEEE Transactions on Magnetics

Volumn 36, Issue 5 I, 2000, Pages 2351-2353

  Veldeman, J ^a   Jia, H ^a   Burgelman, M ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

Magnetic properties; Plastic substrates; Sputtering; Thin films

Indexed keywords

COBALT COMPOUNDS; MAGNETIC HYSTERESIS; MAGNETIC PROPERTIES; MAGNETRON SPUTTERING; REMANENCE; STRESSES; SUBSTRATES;

PLASTIC SUBSTRATES;

MAGNETIC THIN FILMS;

EID: 0034260573     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.908426     Document Type: Article

References (10)

1. Magnetic recording beyond the first 100 years
2. Thin-film media - Current and future technology
3. Influence of magnetron configuration on CoCr films sputtered on flexible substrates
4. Fabrication, micromagnetic and recording properties of CoCrPt on plastic disks
5. Influence of seedlayer on film microstructure of Co-Cr-Pt longitudinal recording media on plastic substrates
6. Magnetic measurement of interaction effects in CoNiCr and CoPtCr thin film media
7. Fundamentals in ion assisted deposition of thin films
8. Magnetic interactions in CoCr films, sputtered with different magnetron configurations
9. Unbalanced dc magnetrons as sources of high ion fluxes
10. In-plane remanence and microstructure in Co-Cr-Ta films