Auger electron spectroscopy study of SiC thin films deposited on silicon

Vacuum

Volumn 58, Issue 4, 2000, Pages 602-608

  Lei, Y M ^a   Yu, Y H ^a   Cheng, L L ^a   Ren, C X ^a   Zou, S C ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; MAGNETRON SPUTTERING; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE; SPUTTER DEPOSITION; THIN FILMS;

REACTIVE SPUTTERING;

SEMICONDUCTING FILMS;

EID: 0034259164     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(00)00356-0     Document Type: Article

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