Tolerancing procedure for inherently compensated, rectangular aerostatic thrust bearings

Tribology International

Volumn 33, Issue 8, 2000, Pages 581-585

  Kwan, Yim Bun Patrick ^a   Post, Justus B ^b  

^a ASML   (Netherlands)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; FITS AND TOLERANCES; SENSITIVITY ANALYSIS; STIFFNESS; SURFACE ROUGHNESS; THRUST BEARINGS;

AEROSTATIC THRUST BEARINGS;

TRIBOLOGY;

EID: 0034244483     PISSN: 0301679X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0301-679X(00)00109-2     Document Type: Article

References (7)

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3. Yabe H., Watanabe N. A study on running accuracy of an externally pressurised gas thrust bearing II. JSME Int. J., Ser. III. 32(4):1989;618-624.
4. Yabe H., Ikuno Y. A study on sliding accuracy characteristics of an externally pressurised gas-lubricated guide way. JSME Int. J., Ser. C. 39(2):1996;371-377.
5. Lemanowicz J. Einfluss der Gleitflächenrauheit auf die Tragfähigkeit pneumostatisch geschmierter Führungen. Werkstatt und Betrieb. 105(11):1972;837-839.
6. Khalil M.F., El-Shorbagy K.A. Surface roughness effects on externally pressurised bearing performance. Wear. 103:1985;1-10.
7. Holster P.L., Jacobs J.A.H. Theoretical analysis and experimental verification on the static properties of externally pressurised air-bearing pads with load compensation. Tribol. Int. 20(5):1987;276-289.