Surface and interface microstructural properties of Ru thin films grown on InSb (111) substrates at room temperature

Applied Surface Science

Volumn 161, Issue 3, 2000, Pages 452-458

  Kim, T W ^a   Lee, D U ^a   Lee, J H ^a   Yoon, Y S ^b   Lee, J Y ^c   Park, H L ^d  

^a Kwangwoon University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

^c Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^d Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; DEPOSITION; FILM GROWTH; GRAIN SIZE AND SHAPE; INTERFACES (MATERIALS); ION BEAMS; POLYCRYSTALLINE MATERIALS; RUTHENIUM; SEMICONDUCTING INDIUM COMPOUNDS; SURFACE ROUGHNESS; THIN FILMS;

INDIUM ANTIMONIDE; ION BEAM-ASSISTED DEPOSITION (IBAD);

METALLIC FILMS;

EID: 0034229295     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00356-1     Document Type: Article

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