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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 4 II, 2000, Pages 2012-2016

Study of the mechanical behavior of plasma-deposited silica films on polycarbonate and steel

(5) Hofrichter, A a Constantinescu, A b Benayoun, S c Bulkin, P a Drevillon B a

a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES (France)

b LABORATOIRE DE MÉCANIQUE DES SOLIDES (France)

c ARTS ET MÉTIERS PARISTECH (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; FINITE ELEMENT METHOD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCARBONATES; PROTECTIVE COATINGS; SILICA; SILICON; STAINLESS STEEL; STRAIN; STRESS ANALYSIS; STRESS CONCENTRATION; VICKERS HARDNESS TESTING;

VICKERS INDENTATION TESTING;

AMORPHOUS FILMS;

EID: 0034227690 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.582464 Document Type: Article

Times cited : (10)

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