Sputtered coatings for microfluidic applications

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 4 II, 2000, Pages 1998-2002

  Matson, Dean W ^a   Martin, Peter M ^a   Bennett, Wendy D ^a   Johnston, John W ^a   Stewart, Donald C ^a   Bonham, Charles C ^a  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC INSULATORS; SPUTTER DEPOSITION; SURFACE ROUGHNESS;

MICROFLUIDIC DEVICES; SPUTTERED COATINGS;

FLUIDIC DEVICES;

EID: 0034225712     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582461     Document Type: Article

References (12)

1. R. S. Wegeng, C. J. Call, and M. K. Drost, in Proceedings of the 1996 Spring National Meeting of AIChE, New Orleans, LA, February 25-29, 1996.
2. W. E. TeGrotenhuis, R. J. Cameron, M. G. Butcher, P. M. Martin, and R. S. Wegeng, Sep. Sci. Technol. 34, 951 (1999).
3. F. Xiang, Y. Lin, J. Y. Wen, D. W. Matson, and R. D. Smith, Anal. Chem. 71, 1485 (1999).
4. Y. Lin, N. Xu, J. Wen, D. Matson, and R. D. Smith, in Micro Total Analysis Systems '98, edited by D. J. Harrison and A. van den Berg, pp. 343-346 (Klewer, Dordrecht, 1998).
5. P. M. Martin, D. W. Matson, and W. D. Bennett, J. Vac. Sci. Technol. A 17, 2264 (1999).
6. See, for example, Micro Total Analysis Systems '98, edited by D. J. Harrison and A. van den Berg (Klewer, Dordrecht, 1998); Design Test, and Microfabrication of MEMS and MOEMS, edited by B. Courtois et al. (SPIE, 1999), Vol. 3680; Process Miniaturization 2nd International Conference on Microreaction Technology, edited by W. Ehrfeld, I. H. Rinard, and R. S. Wegeng (AIChE, 1998); Microfluidic Devices and Systems II, edited by C. H. Ahn and A. B. Frazier (SPIE, 1999), Vol. 3877; Microreaction Technology; Industrial Prospects, edited by W. Ehrfeld (Springer, New York, 2000).
7. See, for example, Micro Total Analysis Systems '98, edited by D. J. Harrison and A. van den Berg (Klewer, Dordrecht, 1998); Design Test, and Microfabrication of MEMS and MOEMS, edited by B. Courtois et al. (SPIE, 1999), Vol. 3680; Process Miniaturization 2nd International Conference on Microreaction Technology, edited by W. Ehrfeld, I. H. Rinard, and R. S. Wegeng (AIChE, 1998); Microfluidic Devices and Systems II, edited by C. H. Ahn and A. B. Frazier (SPIE, 1999), Vol. 3877; Microreaction Technology; Industrial Prospects, edited by W. Ehrfeld (Springer, New York, 2000).
8. See, for example, Micro Total Analysis Systems '98, edited by D. J. Harrison and A. van den Berg (Klewer, Dordrecht, 1998); Design Test, and Microfabrication of MEMS and MOEMS, edited by B. Courtois et al. (SPIE, 1999), Vol. 3680; Process Miniaturization 2nd International Conference on Microreaction Technology, edited by W. Ehrfeld, I. H. Rinard, and R. S. Wegeng (AIChE, 1998); Microfluidic Devices and Systems II, edited by C. H. Ahn and A. B. Frazier (SPIE, 1999), Vol. 3877; Microreaction Technology; Industrial Prospects, edited by W. Ehrfeld (Springer, New York, 2000).
9. See, for example, Micro Total Analysis Systems '98, edited by D. J. Harrison and A. van den Berg (Klewer, Dordrecht, 1998); Design Test, and Microfabrication of MEMS and MOEMS, edited by B. Courtois et al. (SPIE, 1999), Vol. 3680; Process Miniaturization 2nd International Conference on Microreaction Technology, edited by W. Ehrfeld, I. H. Rinard, and R. S. Wegeng (AIChE, 1998); Microfluidic Devices and Systems II, edited by C. H. Ahn and A. B. Frazier (SPIE, 1999), Vol. 3877; Microreaction Technology; Industrial Prospects, edited by W. Ehrfeld (Springer, New York, 2000).
10. See, for example, Micro Total Analysis Systems '98, edited by D. J. Harrison and A. van den Berg (Klewer, Dordrecht, 1998); Design Test, and Microfabrication of MEMS and MOEMS, edited by B. Courtois et al. (SPIE, 1999), Vol. 3680; Process Miniaturization 2nd International Conference on Microreaction Technology, edited by W. Ehrfeld, I. H. Rinard, and R. S. Wegeng (AIChE, 1998); Microfluidic Devices and Systems II, edited by C. H. Ahn and A. B. Frazier (SPIE, 1999), Vol. 3877; Microreaction Technology; Industrial Prospects, edited by W. Ehrfeld (Springer, New York, 2000).
11. K. P. Brooks, P. M. Martin, and M. K. Drost, Mesoscale Combustor/Evaporator Development, ASME Proceedings, 1999 (unpublished).
12. P. M. Martin, J. W. Johnston, W. D. Bennett, and D. C. Stewart, in Proceedings of the 42nd Annual Technical Conference of the Society of Vacuum Coaters, pp. 223-227 (SVC, 1999).