Ultrathick silicon coatings for infrared mirror applications

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1999, Pages 223-226

  Martin, P M ^a   Johnston, J W ^a   Bennett, W D ^a   Stewart, D C ^a   Robichaud, J ^a   Daignault, S ^a   Raudenbush, A ^a  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; LIGHT SCATTERING; MAGNETRON SPUTTERING; MIRRORS; OPTICAL COATINGS; REFLECTION; SILICON; SILICON CARBIDE; STRESSES; SURFACE ROUGHNESS;

INFRARED MIRROR; SILICON CARBIDE COATING; SILICON COATING; ULTRATHICK COATING;

THICK FILMS;

EID: 0032620091     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)