Surface roughness measurement in the submicrometer range using laser scattering

Optical Engineering

Volumn 39, Issue 6, 2000, Pages 1597-1601

  Wang, S H ^a,b   Quan, Chenggen ^a   Tay, C J ^a   Shang, H M ^a,c  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b SICHUAN UNIVERSITY   (China)

^c ASTON UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRAL EQUATIONS; LASER BEAMS; LIGHT POLARIZATION; MICROCOMPUTERS; OPTICAL CORRELATION; OPTICAL FIBERS; PHOTODIODES; SEMICONDUCTOR LASERS; STATISTICAL METHODS; SURFACE ROUGHNESS;

LASER SCATTERING; LIGHT INTENSITY DISTRIBUTION; NONCONTACT MEASUREMENT; SUBMICROMETER RANGE;

LIGHT SCATTERING;

EID: 0034204810     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.602535     Document Type: Article

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