Synthesis and characterization of (hfac)In(CH3)2: A volatile compound useful for CVD of indium and indium-containing materials

Inorganic Chemistry

Volumn 39, Issue 9, 2000, Pages 2008-2010

  Xu, Chongying ^a   Baum, Thomas H ^a   Guzei, Ilia ^b   Rheingold, Arnold L ^b  

^a ENTEGRIS INC   (United States)

^b UNIVERSITY OF DELAWARE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INDIUM; VOLATILE AGENT;

ARTICLE; CHEMICAL ANALYSIS; CHEMICAL REACTION; CRYSTAL STRUCTURE; DRY DEPOSITION; REACTION ANALYSIS; SYNTHESIS; VAPOR;

EID: 0034189926     PISSN: 00201669     EISSN: None     Source Type: Journal    
DOI: 10.1021/ic990266a     Document Type: Article

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