Effect of disk roughness and carbon impact energy on corrosion protection of magnetic recording films

Tribology International

Volumn 33, Issue 5, 2000, Pages 323-327

  Chia, Ray W J ^a   Edwards, James ^b   Geisler, Michael ^c   Wang, Charles ^d  

^a WESTERN DIGITAL CORPORATION   (United States)

^b X LAM Technologies   (United States)

^c Balzers Process Systems   (Germany)

^d SEAGATE TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CORROSION RESISTANCE; GLOW DISCHARGES; HARD DISK STORAGE; HYDROGENATION; ION BEAMS; MAGNETIC FILMS; MAGNETRON SPUTTERING; SPUTTER DEPOSITION; SURFACE ROUGHNESS;

ION ENERGY IMPACT; NITROGENATION; PLASMA BEAM DEPOSITION;

TRIBOLOGY;

EID: 0034187763     PISSN: 0301679X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0301-679X(00)00048-7     Document Type: Article

References (12)

1. Chia R.W.J., Tang W.T., Lee J.J.K. A methodology of measuring nitrogen content in thin nitrogenated carbon overcoats on magnetic thin film media. Tribology Letters. 5:1997;135-139.
2. Chia R.W.J., Li E., Sugi S., Li G.G., Zhu H., Forouhi A.R., Bloomer I. Optical characterization of nitrogenated carbon overcoats. Thin Solid Films. 308-309:1997;284.
3. Grill A., Meyerson B.S., Patel V.V. Diamondlike carbon films by rf plasma-assisted chemical vapor deposition from acetylene. IBM J. Res. Dev. 34:1990;849.
4. Kieser J, Geisler M, Sellschopp M. Plasma treatment apparatus. EP 0235 770 B1, 1987.
5. Kieser J, Geisler M. Large area in line plasma etching and gas phase deposition on planar substrates by use of a hollow anode. Proc. 15 ICPPT, Tokyo, 1987.
6. Kurokawa H, Mitani T, Yonezawa T. Application of diamond like carbon films to metallic thin film magnetic recording media. IEEE Transactions on Magnetics 1987;MAG-23(5).
7. Schön F. Untersuchung einer HF-Plasmastrahlquelle mit Hilfe von Sonden. Thesis, University Würzburg, 1974.
8. Oechnser H, Füßer HJ, Waldorf J, Fuchs A. An RF plasma beam source for thin films and surface technology. In: Proc Int Conf on Plasma Surface Engineering, Garmisch Partenkirchen vol. II, 1989:1017-24.
9. Sattel S. Herstellung und Charakterisierung von plasmastrahl-deponierten hydrogenisierten Kohlenstoffschichten. Diploma, University Kaiserslautern, 1993.
10. Chia R.W.J., Wang C.C., Lee J.J.K., Tang W.T. Overview of corrosion on thin film magnetic media and its implication on head disk interface. Romankiw L.T., Krongleb S., Ahn C.H. Proc. Fifth Int. Symp. on Magnetic Materials, Processes and Devices, vol. 98-20. 1999;255-268 The Electrochemical Society, Pennington, NJ.
11. Ziegler J.E., Biersack J.P., Littmark U. Stopping and Range of Ions in Solids, vol. 1. 1995;Pergamon Press, New York.
12. Jellison G.E. Jr., Modine F.A. Appl. Phys. Lett. 69:1996;3.