|
|
|
Volumn 20, Issue 12, 1997, Pages 86-188,-90
|
|
Vacuum pump designs adjust to harsher conditions
a
a
NONE
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
COST EFFECTIVENESS;
INTEGRATED CIRCUIT MANUFACTURE;
PLASMA APPLICATIONS;
THERMAL EFFECTS;
FLOW RATES;
VACUUM PUMPS;
|
|
EID: 0031257154
PISSN: 01633767
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
|
Times cited : (2)
|
|
References (2)
|
