MOCVD of perovskite thin films using an aerosol-assisted liquid delivery system

Advanced Functional Materials

Volumn 10, Issue 3-5, 2000, Pages 169-175

  Schäfer, Patrick ^a   Waser, Rainer ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

(Pb,Ba)TiO3; BaTiO3; Growth kinetics; Liquid delivery; MOCVD; PbTiO3; SrTiO3; Tetragonal distortion

Indexed keywords

AEROSOLS; DECOMPOSITION; FILM GROWTH; LATTICE CONSTANTS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PEROVSKITE; SOLVENTS; TEMPERATURE CONTROL; VAPORIZATION;

LIQUID DELIVERY SYSTEMS; PEROVSKITE OXIDES;

THIN FILMS;

EID: 0034180043     PISSN: 1616301X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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