ECR-MOCVD of the Ba-Sr-Ti-O system below 400°C. Part I: Processing

Integrated Ferroelectrics

Volumn 21, Issue 1-4, 1998, Pages 305-318

  Alluri, Prasad ^a,b   Majhi, Prashant ^a   Tang, Derek ^a   Dey, Sandwip K ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

^b MOTOROLA INC   (United States)

Author keywords

(Ba,Sr)TiO3; CVD; Design of experiments; Direct liquid injection; ECR; SrTiO3

Indexed keywords

BARIUM COMPOUNDS; ELECTRON CYCLOTRON RESONANCE; OHMIC CONTACTS; PASSIVATION; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; STRONTIUM COMPOUNDS; SUBSTRATES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

DIRECT LIQUID INJECTION SYSTEMS;

DIELECTRIC FILMS;

EID: 11544304331     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589808202072     Document Type: Article

References (8)

1. S.K. Dey and .JJ. Lee, IEEE Trans, on Electron Devices, 39, 1607 (1992)
2. S.K. Dey and P.V. Alluri, MRS Bulletin, XXI, 44 (1996)
3. K.-H. Dahmen and T. Gerfin, Prog. Crystal Growth and Charact., 27, 117 (1993)
4. P.V. Alluri, D. Tang, and S.K. Dey, J. of Integrated Ferroelectrics, 18, 645 (1997).
5. P.-Y. Lesaicherre, H. Yamaguchi, Y. Miyasaka, H. Watanabe, H. Ono, and M. Yoshida, Proceedings of the International Symposium on the Integrated Ferroelectrics, Monterey, March 16, 1994.
6. S.N. Ruddlesden and P. Popper, Acta Cryst., 10, 538 (1957)
7. P.V. Alluri, Ph.D. Dissertation, Arizona State University (1994).
8. S.K. Dey, D. Tang, P. Majhi and P.V. Alluri, J. of Integrated Ferroelectrics, this volume (1998).