Structure, composition and residual stresses of magnesium fluoride thin films deposited by direct evaporation

Materials Science Forum

Volumn 287-288, Issue , 1998, Pages 255-258

  Dumas, L ^a   Robic, J Y ^a   Pauleau, Y ^b  

^a CEA LETI   (France)

^b GRENOBLE INSTITUTE OF TECHNOLOGY   (France)

Author keywords

Electron Beam Evaporation; MgF2; RBS and X Ray Characterization; Residual Stresses

Indexed keywords

EID: 0343957048     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.287-288.255     Document Type: Article

References (8)

1. H.K. Pulker, «Coatings on Glass», Elsevier Science Publication B.V., New York, 1984
2. C. J. Stolz,. J. R. Taylor, W. K. Eckelberg and J. D. Lindh, Applied Optics 32 (1992), p. 5666-5672
3. B. Hirrien, PhD thesis, INPG Grenoble (1997)
4. H. Leplan, B. Geenen, J.-Y. Robic and Y. Pauleau, J. Appl. Phys. 78(2) (1995) p. 962
5. A. Brenner and S. Senderoff, J. Res. Natl. Bur. Stand. 42 (1949), p. 105
6. A. Kinbara, S. Baba, N. Matuda and K. Takamisawa, Thin Solid Films 84 (1981), p. 205
7. A. Lehmann, W. Heerdegen, G. Schirmer, H. Mutschke, W. Richter, E. Hacker and R. Dohle, Phys. Stat. Sol. (a) 119 (1990), p. 683
8. Hirsh, E. H., J .Phys. D 13 (1980), p. 2081