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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 2, 2000, Pages 1081-1084

Improvement of electron emission of silicon field emitter arrays by pulsed laser cleaning

(5) Yavas, O a Suzuki, N a Takai, M a Hosono, A b Okuda, S b

a OSAKA UNIVERSITY (Japan)

b MITSUBISHI ELECTRIC CORPORATION (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; CHEMICAL BONDS; CHEMICAL CLEANING; DECOMPOSITION; ELECTRON EMISSION; IRRADIATION; PHOTOCHEMICAL REACTIONS; PHOTONS; PULSED LASER APPLICATIONS; SILICON; ULTRAVIOLET RADIATION;

EMITTER TIP SURFACE CLEANING;

FIELD EMISSION CATHODES;

EID: 0034155431 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.591333 Document Type: Article

Times cited : (6)

References (13)

1
- 0029273314
- M. Takai, M. Yamashita, H. Wille, S. Yura, S. Horitaba, and M. Ototake, J. Vac. Sci. Technol. B 13, 441 (1995).
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 441
- Takai, M.¹ Yamashita, M.² Wille, H.³ Yura, S.⁴ Horitaba, S.⁵ Ototake, M.⁶

2
- 0010559580
- M. Takai, H. Morimoto, A. Hosono, and S. Kawabuchi, J. Vac. Sci. Technol. B 16, 799 (1998).
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 799
- Takai, M.¹ Morimoto, H.² Hosono, A.³ Kawabuchi, S.⁴

3
- 0001377126
- M. Takai, T. Iriguchi, H. Morimoto, A. Hosono, and S. Kawabuchi, J. Vac. Sci. Technol. B 16, 790 (1998).
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 790
- Takai, M.¹ Iriguchi, T.² Morimoto, H.³ Hosono, A.⁴ Kawabuchi, S.⁵

4
- 0000904032
- M. W. Geis, J. C. Twichell, J. Macaulay, and K. Okano, Appl. Phys. Lett. 67, 1328 (1995).
- (1995) Appl. Phys. Lett. , vol.67 , pp. 1328
- Geis, M.W.¹ Twichell, J.C.² Macaulay, J.³ Okano, K.⁴

5
- 0000078106
- T. Sugino, S. Kawasaki, K. Tanioka, and J. Shirafuji, Appl. Phys. Lett. 71, 2704 (1997).
- (1997) Appl. Phys. Lett. , vol.71 , pp. 2704
- Sugino, T.¹ Kawasaki, S.² Tanioka, K.³ Shirafuji, J.⁴

6
- 0004191695
- Materials Research Society, Pittsburgh
- M. K. Miller and G. D. W. Smith, Atom Probe Microanalysis: Principles and Applications to Materials Problems (Materials Research Society, Pittsburgh, 1989).
- (1989) Atom Probe Microanalysis: Principles and Applications to Materials Problems
- Miller, M.K.¹ Smith, G.D.W.²

7
- 0010626520
- P. R. Schwoebel and C. A. Spindt, Appl. Phys. Lett. 63, 33 (1993).
- (1993) Appl. Phys. Lett. , vol.63 , pp. 33
- Schwoebel, P.R.¹ Spindt, C.A.²

8
- 0010626197
- M. Takai, N. Suzuki, H. Morimoto, A. Hosono, and S. Kawabuchi, J. Vac. Sci. Technol. B 16, 780 (1998).
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 780
- Takai, M.¹ Suzuki, N.² Morimoto, H.³ Hosono, A.⁴ Kawabuchi, S.⁵

9
- 0000988528
- O. Yavas, N. Suzuki, M. Takai, A. Hosono, and S. Kawabuchi, Appl. Phys. Lett. 72, 2797 (1998).
- (1998) Appl. Phys. Lett. , vol.72 , pp. 2797
- Yavas, O.¹ Suzuki, N.² Takai, M.³ Hosono, A.⁴ Kawabuchi, S.⁵

10
- 84987141376
- J. Boneberg, O. Yavas, B. Mierswa, and P. Leiderer, Phys. Status Solidi B 174, 295 (1992).
- (1992) Phys. Status Solidi B , vol.174 , pp. 295
- Boneberg, J.¹ Yavas, O.² Mierswa, B.³ Leiderer, P.⁴

11
- 0016543933
- C. D. Thurmond, J. Electrochem. Soc. 122, 1133 (1975).
- (1975) J. Electrochem. Soc. , vol.122 , pp. 1133
- Thurmond, C.D.¹

12
- 0003998388
- Chemical Rubber, Boca Raton, FL
- CRC Handbook of Chemistry and Physics, 68th ed., edited by R. C. Weast (Chemical Rubber, Boca Raton, FL, 1987).
- (1987) CRC Handbook of Chemistry and Physics, 68th Ed.
- Weast, R.C.¹

13
- 0032638733
- J. Heitz and J. T. Dickinson, Appl. Phys. A: Mater. Sci. Process. 68, 515 (1999).
- (1999) Appl. Phys. A: Mater. Sci. Process. , vol.68 , pp. 515
- Heitz, J.¹ Dickinson, J.T.²

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