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Volumn 43, Issue 17, 2000, Pages 3061-3072

Thermal analysis of the volume absorber in pulsed excimer laser calorimeters

Author keywords

[No Author keywords available]

Indexed keywords

CALORIMETRY; ENERGY ABSORPTION; EXCIMER LASERS; FINITE ELEMENT METHOD; INTERFACES (MATERIALS); MATHEMATICAL MODELS; PULSED LASER APPLICATIONS; THERMAL EFFECTS;

EID: 0034127244     PISSN: 00179310     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0017-9310(99)00355-5     Document Type: Article
Times cited : (16)

References (14)
  • 1
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    • NBS laser power and energy measurements
    • Scott T.R. NBS laser power and energy measurements. Proceedings SPIE 888. 1988;48-54.
    • (1988) Proceedings SPIE 888 , pp. 48-54
    • Scott, T.R.1
  • 4
    • 0141613615 scopus 로고    scopus 로고
    • Optical fabrication rises to the 193-nm challenge
    • (February
    • J. Webb, J. Nemechek, Optical fabrication rises to the 193-nm challenge, Laser Focus World (February 1997) 75-82.
    • (1997) Laser Focus World , pp. 75-82
    • Webb, J.1    Nemechek, J.2
  • 5
    • 0029356978 scopus 로고
    • Heat transfer in excimer laser melting of thin polysilicon layers
    • Xu X., Grigoropoulos C.P., Russo R.E. Heat transfer in excimer laser melting of thin polysilicon layers. Journal of Heat Transfer. 117:1995;708-715.
    • (1995) Journal of Heat Transfer , vol.117 , pp. 708-715
    • Xu, X.1    Grigoropoulos, C.P.2    Russo, R.E.3
  • 6
    • 0029424824 scopus 로고
    • Deep-UV excimer laser measurements at NIST
    • Leonhardt R.W., Scott T.R. Deep-UV excimer laser measurements at NIST. Proceedings SPIE. 2439:1995;448-459.
    • (1995) Proceedings SPIE , vol.2439 , pp. 448-459
    • Leonhardt, R.W.1    Scott, T.R.2
  • 7
    • 0345244666 scopus 로고    scopus 로고
    • Radiation transfer in pulsed-laser-induced plasma
    • Xu X., Song K.H. Radiation transfer in pulsed-laser-induced plasma. Journal of Heat Transfer. 119:1997;502-508.
    • (1997) Journal of Heat Transfer , vol.119 , pp. 502-508
    • Xu, X.1    Song, K.H.2
  • 13
    • 0343528792 scopus 로고    scopus 로고
    • Corning Inc., Corporate Headquarters, Corning, NY 14831
    • Corning Inc., Corporate Headquarters, Corning, NY 14831.
  • 14
    • 0342658586 scopus 로고    scopus 로고
    • ANSYS Inc., Canonsburg, PA
    • ANSYS Inc., Canonsburg, PA.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.