Two-dimensional transient analysis of absorbing thin films in laser treatments

Journal of Heat Transfer

Volumn 122, Issue 1, 2000, Pages 113-117

  Bianco, N ^a   Manca, O ^b  

^a UNIVERSITY OF NAPLES FEDERICO II   (Italy)

^b SECOND UNIVERSITY OF NAPLES   (Italy)

Author keywords

Conjugate; Heat transfer; Laser; Manufacturing; Thin film

Indexed keywords

FILM; HEAT TRANSFER; LASER;

EID: 0034099439     PISSN: 00221481     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.521429     Document Type: Article

References (16)

1. Grigoropoulos, C. P., 1994, "Heat Transfer in Laser Processing of Thin Films," Annual Review of Heat Transfer, C. I., Tien, ed., CRC, Boca Raton, FL, Vol. 5, Chap. 2, pp. 77-130.
2. Chen, G., and Tien, C. L., 1994, "Thermally Induced Optical Nonlinearity During Transient Heating of Thin Films," ASME J. Heat Transfer, 116, pp. 311-316.
3. 2 Film," J. Appl. Phys., 50, pp. 3783-3784.
4. Colinge, J. P., and Van de Viele, F., 1981, "Laser Light Absorption in Multilayers," J. Appl. Phys., 52, pp. 4769-4771.
5. Park, H. K., Xu, X., Grigoropoulos, C. P., Do, N., Klees, L., Leung, P. T., and Tam, A. C., 1993, "Transient Optical Transmission Measurement in Excimer-Laser Irradiation of Amorphous Silicon Films," ASME J. Heat Transfer, 115, pp. 178-183.
6. Grigoropoulos, C. P., Park, H. K., and Xu, X., 1993, "Modeling of Pulsed Laser Irradiation of Thin Silicon Layers," Int. J. Heat Mass Transf., 36, pp. 919-924.
7. Mansuripur, M., Connell, G. A. N., and Goodman, J. W., 1982, "Laser-Induced Local Heating of Multilayers," Appl. Opt., 21, pp. 1106-1114.
8. Nakano, S., et al., 1986, "Laser Patterning Method for Integrated Type a Si Solar Cell Submodules," Jpn. J. Appl. Phys., Part 1, 25, pp. 1936-1943.
9. Madison, M. R., and McDaniel, T. W., 1989, "Temperature Distributions Produced in an N-Layer Film Structure by Static or Scanning Laser or Electron Beam With Application to Magneto-Optical Media," J. Appl. Phys., 66, pp. 5738-5748.
10. McGahan, W. A., and Cole, K. D., 1992, "Solutions of Heat Conduction Equation in Multilayers for Photothermal Deflection Experiments," J. Appl. Phys., 72, pp. 1362-1373.
11. Cole, K. D., and McGahan, W. A., 1993, "Theory of Multilayers Heated by Laser Absorption," ASME J. Heat Transfer. 115, pp. 767-771.
12. Knittl, Z., 1976, Optics of Thin Films, John Wiley and Sons, London, UK.
13. Ong, C. K., Tan, H. S., and Sin, E. H., 1986, "Calculation of Melting Threshold Energies of Crystalline and Amorphous Materials due to Pulsed-Laser Irradiation," Mater. Sci. Eng., 79, pp. 79-85.
14. Kiyama, S., Hirono, Y., Hosokawa, H. Moriguchi, T., Nakano, S., and Osumi, M., 1990, "Temperature Distribution Analysis in Multi-Layer Thin Film Structures by Laser Beam Irradiation," Jpn. Soc. Precision Eng., 56, pp. 1500-1506.
15. Do, N., Klees, L., Leung, P. T., Tong, F., Leung, W. P., and Tam, A. C., 1992, "Temperature Dependence of Optical Constants for Amorphous Silicon," Appl. Phys. Lett., 60, pp. 2186-2188.
16. Angelucci, N., Bianco, N., and Manca, O., 1997, "Thermal Transient Analysis of Thin Film Multilayers Heated by Pulsed Laser," Int. J. Heat Mass Transf., 40, pp. 4487-4491.