Characterization of (Ti1-xAlx)N films prepared by radio frequency reactive magnetron sputtering

Journal of the European Ceramic Society

Volumn 20, Issue 6, 2000, Pages 795-799

  Rauch, J Y ^a   Rousselot, Ch ^b   Martin, N ^b   Jacquot, Ch ^a   Takadoum, J ^a  

^a Centre National de la Recherche Scientifique   (France)

^b Lab Metrologie Interfaces T   (France)

Author keywords

(Ti, Al)N; Films; Hardness; Sputtering; Wear resistance

Indexed keywords

ADHESION; CERAMIC COATINGS; COMPOSITION; CRYSTAL STRUCTURE; HARDNESS; MAGNETRON SPUTTERING; NITRIDES; STEEL; SUBSTRATES; TRIBOLOGY; VICKERS HARDNESS TESTING; WEAR RESISTANCE;

PIN ON DISK TRIBOMETER; RADIO FREQUENCY REACTIVE MAGNETRON SPUTTERING; SCRATCH TEST; VICKERS MICROINDENTATION TEST;

THIN FILMS;

HARDNESS; SPUTTERING; TRIBOLOGICAL DESIGN; TRIBOLOGY; WEAR RESISTANCE;

EID: 0034017024     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0955-2219(99)00200-9     Document Type: Article

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