Influence of argon pressure on the depth resolution during GDOES depth profiling analysis of thin films

Surface and Interface Analysis

Volumn 29, Issue 2, 2000, Pages 155-159

  Shimizu, K ^a   Habazaki, H ^b   Skeldon, P ^c   Thompson, G E ^c   Wood, G C ^c  

^a KEIO UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

^c UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM; ARGON; DEGRADATION; EMISSION SPECTROSCOPY; INTERFACES (MATERIALS); PRESSURE EFFECTS; SPUTTERING; THIN FILMS;

DEPTH PROFILING ANALYSIS; GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY (GDOES);

AMORPHOUS FILMS;

EID: 0033908172     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(200002)29:2<155::AID-SIA729>3.0.CO;2-G     Document Type: Article

References (11)

1. Payling R, Jones D, Bengtson A. Glow Discharge Optical Emission Spectroscopy. Wiley: Chichester, 1997.
2. Payling R. Spectroscopy 1998; 13: 36.
3. Shimizu K, Brown GM, Habazaki H, Kobayashi K, Skeldon P, Thompson GE, Wood GC. Surf. Interface Anal. 1999; 27: 24.
4. Shimizu K, Brown GM, Habazaki H, Kobayashi K, Skeldon P, Thompson GE, Wood GC. Electrochim. Acta 1999; 44: 2297.
5. Shimizu K, Habazaki H, Skeldon P, Thompson GE, Wood GC. J. Surf. Finish. Soc. Jpn. 1999; 50: 538.
6. Shimizu K, Habazaki H, Skeldon P, Thompson GE, Wood GC. Surf. Interface Anal. 1999; 27: 250.
7. Shimizu K, Habazaki H, Skeldon P, Thompson GE, Wood GC. Surf. Interface Anal. 1999; 27: 998.
8. Shimizu K, Brown GM, Habazaki H, Kobayashi K, Skeldon P, Thompson GE, Wood GC. Surf. Interface Anal. 1999; 27: 153.
9. Hoffman V, Kurt R, Krammer K, Thielsch R, Writh Th, Beck U. Appl. Spectrosc. 1999; 53: 987.
10. Zhou X, Habazaki H, Shimizu K, Skeldon P, Thompson GE, Wood GC. Thin Solid Films 1997; 292: 150.
11. Franzreb K, Mathicu HJ, Landolt L. Surf. Interface Anal. 1995; 23: 641.