Ion irradiation of preceramic polymer thin films

Journal of the American Ceramic Society

Volumn 79, Issue 7, 1996, Pages 1967-1970

  Pivin, Jean Claude ^a   Colombo, Paolo ^b,c   Tonidandel, Marco ^b  

^a 91405 Orsay Campus   (France)

^b UNIVERSITY OF PADOVA   (Italy)

^c AMERICAN CERAMIC SOCIETY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CERAMIC MATERIALS; COATINGS; COMPOSITION; DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; ION BOMBARDMENT; NANOTECHNOLOGY; RAMAN SPECTROSCOPY; SILICON; SILICONES;

NANOINDENTATION; POLYCARBOSILANES; PRECERAMIC POLYMERS;

PLASTIC FILMS;

EID: 0030190914     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1996.tb08021.x     Document Type: Article

References (19)

1. T Venkatesan, "High Energy Ion Beam Modification of Polymer Films," Nucl. Instrum. Methods, B7, 461-67 (1985).
2. J. C. Pivin, P. Viel, G. Zalczer, and G. Marletta, "Effects of Ionizations and Displacements on the Hardness and Optical Absorption of Some Ion Irradiated Polymers," Nucl. Instrum. Methods, B105, 192-95 (1995).
3. J. C. Pivin, "Contribution of Ionizations and Atomic Displacements to the Hardening of Ion-Irradiated Polymers," Thin Solid Films, 263, 185-93 (1995).
4. 2 Spin-on-Glass Due to Ion Implantation," Appl. Phys. Lett., 59, 2953-55 (1991).
5. T. E. Levine, J. K. Keddie, P. Revesz, J. W. Mayer, and E. P. Giannelis, "Ion-Beam-Induced Densification of Zirconia Sol-Gel Thin Films," J. Am. Ceram. Soc., 76, 1369-72 (1993).
6. H. Hirashima, K. Adachi, and H. Imai, "Modification of Sol-Gel Films by Ion Implantation," Mater. Res. Soc. Symp. Proc., 346, 183-88 (1994).
7. J. C. Pivin, G. Brusatin, and G. Zalczer, "Properties of Molecular Organosilicate Composites Submitted to Ion Irradiations," Thin Solid Films, in press.
8. E. Cottereau J. Camplan, J. Chaumont, R. Meunier, and H. Bernas, "Aramis: An Ambidextrous 2 MV Accelerator for IBA and MeV Implantation," Nucl. Instrum. Methods, B45, 293-97 (1990).
9. P. Colombo, T. E. Paulson, and C. G. Pantano, "Atmosphere Effects in the Processing of Silicon Carbide and Silicon Oxycarbide Thin Films and Coatings," J. Sol-Gel. Sci. Technol., 2, 601-604 (1994).
10. P. Colombo, T. E. Paulson, and C. G. Pantano, "Conversion of Silicone Resin to Silicon (Oxy)carbide," Ceram. Acta, 3, 13-21 (1993).
11. S. Yajima, in Handbook of Composites, Vol. 1, "Strong Fibers"; pp. 202-37. Edited by W. Watt and B. V. Perov. Elsevier Science, New York, 1985.
12. G. D. Sorarù, F. Babonneau, and J. D. Mackenzie, "Structural Evolution from Polycarbosilane to SiC Ceramics," J. Mater. Sci., 25, 3886-93 (1990).
13. (a) G. M. Renlund, S. Prochazka, and R. H. Doremus, "Silicon Oxycarbide Glasses: Part I. Preparation and Chemistry," J. Mater. Res., 6, 2716-22 (1991).
14. (b) G. M. Renlund, S. Prochazka, and R. H. Doremus, "Silicon Oxycarbide Glasses: Part II. Structure and Properties," J. Mater. Res., 6, 2723-34 (1991).
15. P. Le Coustumer, M. Mothioux, and A. Oberlin, "Understanding Nicalon» Fibre," J. Eur. Ceram. Soc., 11, 95-103 (1993).
16. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids. Pergamon Press, Oxford, U.K., 1985.
17. J. C. Pivin, A. Ritter, S. Shamin, E. Z. Kurmaev, and A. Lautie, "Characterization of Bonding Configuration in Carbon Films Generated by Ion Implantation"; submitted to Diamond Relat. Mater.
18. R. J. Nemanich, J. T. Glass, G. Lucovisky, and R. E. Shroder, "Raman Scattering Characterization of Carbon Bonding in Diamond and Diamond-like Thin Films," J. Vac. Sci. Technol., A6, 1783-86 (1988).
19. A. Moritomo, M. Kumeda, and T. Shimizu, "Crystallization Process in Tetraedrally Bonded Binary Amorphous Semiconductors," J. Non-Cryst. Solids, 59, 537-41 (1983).