Combinatorial ion synthesis and ion beam analyses of materials libraries on thermally grown SiO2

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Volumn 72, Issue 2, 2000, Pages 113-116

  Chen, C M ^a   Pan, H C ^a   Zhu, D Z ^a   Hu, J ^a   Li, M Q ^a  

^a Shanghai Institute of Nuclear Research AcademiaSinica   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODOLUMINESCENCE; ION BEAMS; ION IMPLANTATION; OPTICAL PROPERTIES; PHYSICAL PROPERTIES; PROTONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING BORON; SEMICONDUCTOR DOPING; SILICON WAFERS; SINGLE CRYSTALS; SYNTHESIS (CHEMICAL);

MATERIAL LIBRARIES; PHYSICAL MASKING; PROTON ELASTIC SCATTERING;

SILICA;

EID: 0033907397     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(99)00500-0     Document Type: Article

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