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Materials Chemistry and Physics

Volumn 63, Issue 2, 2000, Pages 122-126

Ohmic performance comparison for Ti/Ni/Au and Ti/Pt/Au on InAs/graded InGaAs/GaAs layers

(6) Lyu, Yen Tang a Jaw, Kuo Liang a Lee, Ching Ting a Tsai, Chang Da a Lin, Yow Jon a Cherng, Ya Tung b

a NATIONAL CENTRAL UNIVERSITY (Taiwan)

b CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DEPOSITION; ELECTRIC RESISTANCE; EPITAXIAL GROWTH; GOLD; METALLIZING; NICKEL; OHMIC CONTACTS; PLATINUM; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; THERMODYNAMIC STABILITY; TITANIUM;

INDIUM ARSENIDE; SPECIFIC CONTACT RESISTANCE;

HETEROJUNCTIONS;

EID: 0033907097 PISSN: 02540584 EISSN: None Source Type: Journal
DOI: 10.1016/S0254-0584(99)00208-4 Document Type: Article

Times cited : (17)

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