Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates

IEEE Transactions on Semiconductor Manufacturing

Volumn 13, Issue 1, 2000, Pages 88-96

  Ho, Weng Khuen ^b   Tay, Arthur ^a,b   Schaper, Charles D ^c  

^a STANFORD UNIVERSITY   (United States)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^c Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ERROR ANALYSIS; FEEDBACK CONTROL; LINEAR PROGRAMMING; MATHEMATICAL MODELS; OPTIMAL CONTROL SYSTEMS; PREDICTIVE CONTROL SYSTEMS; PROCESS CONTROL;

SEMICONDUCTOR WAFERS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0033902149     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.827348     Document Type: Article

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