New projection exposure method using a liquid crystal display as a switching matrix in place of a reticle

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 1, 2000, Pages 324-329

  Horiuchi, Toshiyuki ^a   Miyakawa, Tomoki ^a,b   Hosoda, Shinnosuke ^a,c  

^a TOKYO DENKI UNIVERSITY   (Japan)

^b NIKON CORPORATION   (Japan)

^c SMC Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FLAT PANEL DISPLAYS; LITHOGRAPHY; OPTICAL INSTRUMENT LENSES; PROJECTION SYSTEMS;

PROJECTION EXPOSURE METHOD; PROJECTION LITHOGRAPHY; RETICLE; SWITCHING MATRIX;

LIQUID CRYSTAL DISPLAYS;

EID: 0033901793     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.39.324     Document Type: Article

References (6)

1. T. Miyakawa, S. Hosoda and T. Horiuchi: Ext. Ahstr. (46th Spring Meet. 1999, Chiba); Japan Society of Applied Physics and Related Societies, 28p-YB-8 [in Japanese].
2. K. Okano and S. Kobayashi: Ekisho Oyohen (Liquid Crystal, Application Version) (Baifukan, Tokyo, 1985) p. 16 [in Japanese].
3. T. Uchida: Jisedai Ekisho Display Gijutsu (Next Generation Technology of Liquid Crystal Display) (Kogyo chosa-kai, Tokyo, 1994) p. 61 [in Japanese].
4. J. R. Maldonado: J. Vac. Sci. & Technol. B 12 (1994) 4005.
5. K. Deguchi, K. Miyoshi, M. Oda, T. Matsuda, A. Ozawa and H. Yoshihara: J. Vac. Sci. & Technol. B 14 (1996) 4294.
6. T. Hayashida, T. Tajima, Y. Takiguchi, M. Kosugi, T. Watanabe and M. Abe: Ext. Abstr. (45th Spring Meet. 1998, Tokyo): Japan Society of Applied Physics and Related Societies, 29a-YL-2 [in Japanese].