Microlens arrays with spatial variation of the optical functions

Pure and Applied Optics (Print edition) (United Kingdom)

Volumn 6, Issue 6, 1997, Pages 673-681

  Hessler, Th ^a   Rossi, M ^a   Pedersen, J ^a   Gale, M T ^a   Wegner, M ^b   Steudle, D ^b   Tiziani, H J ^b  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; LASER BEAMS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE TESTING;

MICROLENSES;

LENSES;

EID: 0031272907     PISSN: 09639659     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-9659/6/6/009     Document Type: Article

References (9)

1. Völkel R, Nussbaum Ph, Herzig H P, Dändliker R and Hugle W B 1995 Microlens arrays for optical lithography EOS Topical Meetings Digest Series 5 100-5
2. Gale M T 1997 Direct writing of continuous-relief elements Micro-Optics - Elements, Systems, and Applications ed H P Herzig (London: Taylor and Francis)
3. Hessler Th, Gale M T, Rossi M and Kunz R E 1995 Fabrication of microlens arrays by direct writing in photoresist EOS Topical Meetings Digest Series 5 37-43
4. Gale M T, Rossi M, Pedersen J and Schütz H 1994 Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresist Opt. Eng. 33 3556-66
5. Rossi M, Blough C G, Raguin D H, Popov E K and Maystre D 1996 Diffraction efficiency of high-NA continuous-relief diffractive lenses Diffractive Optics and Micro-Optics vol 5 (OSA Technical Digest Series) p 233
6. Rossi M, Kunz R E, and Herzig H-P 1995 Refractive and diffractive properties of planar micro-optical elements Appl. Opt. 34 5996-6007
7. Hessler Th and Kunz R E 1997 Relaxed fabrication tolerances for low Fresnel number lenses J. Opt. Soc. Am. A 14 1599-606
8. Tiziani H J, Achi R, Krämer R N, Hessler Th, Gale M T, Rossi M and Kunz R E 1997 Microlens arrays for confocal microscopy Opt. Laser Technol. 29 85-91
9. Tiziani H J and Uhde H M 1994 Three-dimensional analysis by a microlens-array confocal arrangement Appl. Opt. 33 567-72