An investigation on suction force of vacuum pumps for micro-components

Vacuum

Volumn 56, Issue 2, 2000, Pages 123-128

  Qiao, Y ^a   Bu, H ^b  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b Beijing College of Mechanical Industry   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AIR; VISCOSITY OF GASES;

SUCTION FORCE;

VACUUM PUMPS;

EID: 0033894532     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(99)00179-7     Document Type: Article

References (6)

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3. Massey BS. Mechanics of fluids, 2nd ed. London: Van Nostrand Reinhold, 1970.
4. White FM. Fluid mechanics. Optional: Milton van Dyke. New York: Parabolic Press, 1994.
5. Thomas S. Applied modeling and dimensional analysis. New York: McGraw-Hill, 1997.
6. Barenblatt GI. Scaling self-similarity and intermediate asymptotics. London: Cambridge University Press, 1994.