Integration of thin film electronics and MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2722, Issue , 1996, Pages 66-74

  Fonash, Stephen J ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL SYSTEMS (MEMS); POLYCRYSTALS; POLYSILICON;

ELECTROMECHANICAL DEVICES; OPTOELECTRONIC DEVICES; PIEZOELECTRIC DEVICES; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON;

THIN FILM DEVICES;

EID: 0029747345     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (23)