Theoretical investigations of adsorption of fluorine atoms on the Si(001) surface

Surface Science

Volumn 444, Issue 1, 2000, Pages 79-86

  Ezaki, Takahide ^a   Ohno, Takahisa ^b  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; ETCHING; FLUORINE; PROBABILITY DENSITY FUNCTION; SURFACE STRUCTURE;

FACETING; FIRST-PRINCIPLES PSEUDOPOTENTIAL TOTAL-ENERGY CALCULATIONS;

SILICON;

EID: 0033893275     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(99)00901-2     Document Type: Article

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