Study of the carbon concentration distribution in iron and titanium after low-temperature carbon ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 139, Issue 1-4, 1998, Pages 338-343

  Koniger A ^a   Wenzel, A ^a   Zeitler, M ^a   Gerlach, J ^a   Hammerl, C ^a   Assmann, W ^b   Huber, H ^b   Stritzker, B ^a   Rauschenbach, B ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

^b UNIVERSITY OF MUNICH   (Germany)

Author keywords

Carbon ion implantation; Concentration distribution; Elastic recoil detection analysis

Indexed keywords

ANNEALING; CARBON; COMPUTER SIMULATION; COMPUTER SOFTWARE; DIFFUSION IN SOLIDS; DOSIMETRY; IRON; MONTE CARLO METHODS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; THERMAL EFFECTS; TITANIUM;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA); SOFTWARE PACKAGE TRIDYN;

ION IMPLANTATION;

EID: 0032043002     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00046-9     Document Type: Article

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