Temperature effects on the energy spreads in liquid metal ion sources

Journal of Physics D: Applied Physics

Volumn 31, Issue 24, 1998, Pages 3463-3468

  Kim, Young Guon ^a   Kim, Young Sam ^a   Choi, Eun Ha ^a   Kang, Seung Oun ^a   Cho, Guangsup ^a   Uhm, Han S ^b  

^a Kwangwoon University   (South Korea)

^b Ajou University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; ELECTRIC CURRENTS; ION BEAMS; LIQUID METALS; RANDOM PROCESSES; THERMAL EFFECTS;

COULOMB INTERACTIONS;

ION SOURCES;

EID: 0032317541     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/31/24/009     Document Type: Article

References (11)

1. Prewett P D and Mair G L R 1991 Focused Ion Beams from Liquid Metal Ion Sources (New York: Wiley) ch 3
2. Swanson L W, Schwind G A, Bell A E and Brady J E 1979 J. Vac. Sci. Technol. 16 1864
3. Swanson L W, Schwind G A and Bell A E 1980 J. Appl. Phys. 51 3453
4. Knauer W 1979 Optik 54 221
5. Knauer W 1981 Optik 59 335
6. Gesley M A and Swanson L W 1984 J. Physique 45 C9-167
7. Mair G L R, Mulvey T and Forbes R G 1984 J. Physique 45 C9-179
8. Uhm H S, Choi E H, Cho G S and Kang S O 1994 Phys. Plasmas 1 4105
9. Cho G S, Kim Y G, Choi E H and Kang S O 1998 J. Korean Phys. Soc. 32 811
10. Prewett P D, McMillan D J, Jefferies D K and Mair G L R 1983 Proc. SPIE 393 120
11. Bell A E, Rao K, Schwind G A and Swanson L W 1988 J. Vac. Sci. Technol. B 6 927