Ozone gas sensors with high sensitivity using Zn2In2O5-MgIn2O4 multicomponent oxide thin films

Surface and Coatings Technology

Volumn 126, Issue 2-3, 2000, Pages 219-224

  Miyata, Toshihiro ^a   Hikosaka, Tomohiro ^a   Minami, Tadatsugu ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Magnetron sputtering; Multicomponent oxide; O3 gas sensor; Sensing mechanism; Thin films

Indexed keywords

GAS ADSORPTION; GRAIN BOUNDARIES; MAGNESIUM COMPOUNDS; MAGNETRON SPUTTERING; OXIDES; OZONE; THIN FILMS; ZINC COMPOUNDS;

MULTICOMPONENT OXIDE;

CHEMICAL SENSORS;

EID: 0033884472     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00526-0     Document Type: Article

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