High-resolution angular and displacement sensing based on the excitation of surface plasma waves

Applied Optics

Volumn 36, Issue 19, 1997, Pages 4521-4525

  Margheri, G ^a   Mannoni, A ^a   Quercioli, F ^a  

^a ISTITUTO NAZIONALE DI OTTICA   (Italy)

Author keywords

Attenuated total reflection; Metrology; Sensors

Indexed keywords

ACTUATORS; ANGLE MEASUREMENT; COMPUTATIONAL METHODS; DISTANCE MEASUREMENT; LIGHT ABSORPTION; LIGHT REFLECTION; PIEZOELECTRIC DEVICES; PLASMA WAVES; SENSITIVITY ANALYSIS; SURFACE WAVES;

ANGULAR SENSORS; ATTENUATED TOTAL REFLECTION; DISPLACEMENT SENSORS;

OPTICAL SENSORS;

EID: 0031188788     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.004521     Document Type: Article

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